Used AXCELIS / FUSION WSI #9087726 for sale

AXCELIS / FUSION WSI is an advanced etch/ash equipment designed to eradicate the need for manual etch processes and airborne etch/ash systems. FUSION WSI system uses a combination of a deep UV laser, high power radio frequency sources, and a combined gas and chemical delivery unit. The machine also features an automated chamber washing tool for a cost-effective way to quickly and reliably clean the chamber after each etch or ash cycle. This integrated asset provides a high throughput, high uniformity, process solution capable of achieving various thin film sizes and shapes. The model is capable of producing precise patterns on a wide range of materials, including GaAs, silicon, polysilicon, SiGe, and nitride. AXCELIS WSI equipment is powered by a wide range of materials, including gas, liquid, and plasma sources. The system is capable of delivering precise and repeatable process recipes and also provides the user with greater flexibility when programming the etch and ash recipes. The high power radio frequency sources are used to provide a precise plasma etch for GaAs, SiGe, and nitride materials. The deep UV (DUV) laser is used to efficiently develop etch recipes by allowing it to effectively pattern and etch difficult materials such as polysilicon and GaAs. WSI unit also features an automated feeder machine, which allows the user to precisely feed wafers into the tool. The feeder asset features an integrated antistatic that prevents non-uniformity and contamination. AXCELIS / FUSION WSI model is equipped with process control that provides high precision for a wide range of etch and ash processes. The equipment also allows the user to power down and ramp up between recipes quickly and effectively. The powered down and ramp up capability prevents sudden changes in process recipes that can cause deleterious results. In conclusion, FUSION WSI system is a highly advanced etcher/asher that is designed to provide precise etches on a wide range of materials. With its automated feeder unit, its integrated antistatic and its process control capabilities, the machine is capable of providing repeatable etch recipes with high precision and uniformity. It provides a cost effective and efficient way to accurately etch and ash materials with a minimal amount of time consumption.