Used AXCELIS Integra #9389490 for sale

AXCELIS Integra is an advanced dry-etch equipment designed to provide etch processing capability to large-scale compound and single-crystal semiconductor wafers. It is capable of performing etching using either conventional chemical vapor deposition (CVD) or plasma deposition. Integra system will allow users to etch multiple layers in sequence, enabling high resolution etching across a wide range of functional materials. The unit employs an innovative design that is detailed in Optics and Photonics Technical Handbook, 2nd edition. The machine consists of two parts: a chamber and a power source. The chamber contains a high vacuum environment, which is used for etch processing and is outfitted with an adjustable shutter door to prevent ambient contamination. The power source consists of a dc-link inverter and an AC/DC battery, both of which are capable of delivering up to 7 kV of power. The tool enables users to adjust the etching rate through the control of the power source, allowing for high process efficiency and flexibility. AXCELIS Integra is fueled by the latest lithography and etch subsystems, resulting in an integrated solution that delivers unmatched performance and reliable etch results. The asset is capable of etching layers as thin as 20 nm, with a process depth consistency of better than 2 percent. The etch process has a wide range of compatible materials, including copper, gallium nitride, aluminum nitride, and silicided polysilicon. A number of etch modes are available, which allow users to fine tune the etch process to optimize resolution, yield, and other process parameters. Integra model also features enhanced safety features, like the active gas monitoring equipment, automatic emergency stop, and over-temperature alarm. These safety systems ensure that users have adequate protection from any hazardous processes and materials. In addition, the system is NRTL compliant, meaning it meets the requirements of the National Fire Protection Association and UL. AXCELIS Integra unit is an ideal etch solution for any semiconductor application requiring reliable etching with precise control over the etch process. With its innovative design, adjustable etch rates, wide range of compatible materials, and enhanced safety features, Integra is a great choice for any etching or processing task.