Used AXIC Multimode HF-8 #9171691 for sale
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ID: 9171691
RIE Plasma processor
With water cooled parallel electrodes
ADVANCED ENERGY RFX-600 Power supply
Automatic RF matching
(3) MFC's for gas control
Process controller for multi-step processing
13.56 MHz, 600 W.
AXIC Multimode HF-8 is a modern etcher/asher designed for applications in high frequency circuit fabrication. The HF-8 offers fast, uniform etching and ashing times for even the most complex microfabrication processes. The equipment utilizes a 550W high frequency inductive source system and will process substrates up to 8" in diameter. The inductive source and chamber design provides for improved process uniformity and repeatability. The HF-8 also features a digital engine that allows for time-based, accurate etching and ashing processes. The digital engine includes a programmable temperature control unit for accurate temperature control to within ± 2°C of target values. This allows for consistent results with varying process recipes, ensuring reliable device performance. The machine also provides for communications between the etcher/asher and recipe management software, allowing for easy customization and selection of process recipes. The HF-8 is equipped with an RVF gas delivery tool for efficient delivery of etch and ashing gases, as well as DI/UPW chambers for ultra-pure precursors and product elimination. The N2 carrier gas is also completely isolated from the process chamber, eliminating the need for a external carrier gas supply. The asset includes a fully computerized, touch screen interface for monitoring and displaying process data. The included graphical software allows the user to visually monitor and control etching/ashing recipes. The real-time process monitor allows for recording and logging of uses and recipes, allowing for easy analysis and comparison of different process results. Multimode HF-8 is an ideal model for precise high frequency circuit fabrication, offering improved process control, uniform results, and greater flexibility than traditional etching and ashing processes.
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