Used BAL-TEC RES010 #171772 for sale
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BAL-TEC RES-010 is a precision bench-top etching/ashing system designed for medium to large scale substrate processing. It is ideal for research and development of processes such as etching of electro-optic crystals and glass, thin-film etch chemistry, MEMS device etching, and semi-conductor ashing and stripping. The system consists of five main components; a main unit, a power supply, a bench-top, a process chamber and a coolant supply. The main unit houses the process chamber and consists of an upper and lower chamber to supply a light source for an etching mask. The power supply and the bench-top are equipped with a digital display for easy adjustment of the etching parameters. The process chamber is designed to allow both vertical and lateral flow or media inlet and outlet, which makes the process versatile and efficient. The integrated coolant supply ensures optimal and stable process temperatures, while the fully enclosed thermal insulation keeps the chamber's temperature stable during the processing cycle. This ensures that the substrate is processed at a much higher temperature than the surrounding environment and is also capable of achieving sub-micron feature sizes. BAL-TEC RES-010 has a range of process-specific recipes, which can be stored and recalled quickly and easily, making it easy to customise each recipe and have complete control over the process. It also features a fully automated quartz crystal monitor, allowing users to track the etching progress while ensuring the etch is proceeding correctly. The etcher is fitted with a turbomolecular pump, allowing optimal uniformity over a wide etch area. BAL-TEC RES-010 provides excellent etch uniformity and repeatability, making it an ideal tool for medium to large scale processes. This makes it suitable for industries ranging from semiconductor to microelectronic devices, providing reliable results every time. The system also guarantees safety with its PEEK reinforced walls and excellent thermal insulation for optimal protection against accidental thermal shock and strain.
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