Used BALZERS BAF 400 #9016405 for sale

BALZERS BAF 400 is a high performance Plasma Asher system manufactured by BALZERS. Specifically designed for research and process integration, it is capable of reactive ion etching (RIE) as well as ashing and cleaning of thick and thin films on a variety of substrates. The system utilizes a proprietary Inductively Coupled Plasma (ICP) source and is capable of a number of processes including, O2, SF6, CF4 and Ar plasma etching. The ICP source has an improved stability and process flexibility that offers more precise control over the process parameters, resulting in superior cleaning and etching results. The components that make up BAF 400 are fully integrated and designed to work together, providing reliability and repeatability. The system is equipped with a controller for parameter control and a vacuum interlock that automatically shuts off the plasma when the chamber pressure exceeds a certain limit. Furthermore, BALZERS BAF 400 features a high temperature etch feature that allows etching of materials at temperatures up to 185 °C. Multiple process parameters such as pressure, RF power and gas flow rate can be adjusted during the etching process. The chamber is outfitted with an inlet and outlet for gas management that enables fast, uniform dosage of process gases. The chamber can also be connected to an external vacuum pump for efficient exhaust of reactive gases. BAF 400 is also fitted with a heated shower plate with temperature ranges between -20 to +100 °C for safe and reliable processing. A conformal coating feature is included allowing for a uniform coating on samples. With its precise control parameters and versatile features, BALZERS BAF 400 is an excellent etching solution for R&D and process integration applications. Its dependability and high etching quality make it a valuable addition to any lab or production environment.