Used BALZERS / INFICON LFC 150 #9279137 for sale

BALZERS/INFICION BALZERS / INFICON LFC 150 is an etcher or asher designed for the precise and ultra-fast tungsten etching and heavy metal ashing process over large and small substrate area. It is one of the most advanced etching systems in the market today and is a very reliable and cost-effective tool that has been integrated for use in advanced microfabrication techniques such as IC manufacturing, MEMS, and semiconductor applications. The etcher consists of a powerful CO2 laser equipment and a precision second harmonic resonator that is designed to provide the highest etching accuracy with minimal thermal degradation. BALZERS LFC 150 is equipped with two independent laser beams and a high-precision multi-axisstage that offers precise control over the etching process. Both lasers can be programmed to perform the same etching cycle simultaneously, increasing productivity and allowing more precise etching with less time and effort. The stage also comeswith a temperature control system, that helps ensure that the working temperature is maintained between 0-30°C, and a vacuum unit offering a base pressure of 40 mbar. The vacuum machine is designed to rapidly eliminate contamination from the process chamber resulting in high etching yields and long-term accuracy. The tool also includes a control software and PC interface, which can be used to easily program and monitor the etching process. This allows forno interruption of the etch process, and all parameters such as laser burst on/off, laser intensity, etching profile, and etching area can be changed instantly. In addition, the asset has a range of specialized detectors to monitor the etch process continuously, ensuring the highest quality results. INFICON LFC 150 is an ideal tool for various advanced microfabrication applications, such as high-end device, MEMS, and IC manufacturing. Its precision etching and superior ashing capabilities, as well as its high-level automation, provide an efficient, user-friendly etching tool with reliable results.