Used BALZERS / INFICON LFC 150 #9298823 for sale

BALZERS / INFICON LFC 150 is a multifunctional etcher or asher designed to etch and asher various samples in a highly reliable and reproducible manner. This equipment is designed for use in the laboratory or semiconductor industry and features a small footprint, making it ideal for small spaces. BALZERS LFC 150 is composed of an integrated process tank made of stainless steel tank that contains an automated chemical delivery and waste management system. The fluid in the tank is provided by a high-pressure pump unit and can also be supplemented via a separate reaction chamber machine, allowing for multi-step processes. The integrated tool includes the necessary process power supplies, as well as an energy and temperature control asset for precise control of the etching and/or ashing process. Additionally, the control model is connected to a vacuum apparatus that can be used as an alternate process control for etching and/or ashing. INFICON LFC 150 is further equipped with a variety of process monitors, such as pressure, temperature, voltage, and atmosphere gauges, as well as a wide range of other safety features that can monitor potential hazardous situations during the process. Additionally, this equipment features automatic process control which allows for fast and efficient operation and minimal user intervention for monitoring and controlling the etching and/or ashing process. LFC 150 is also capable of precisely controlling the etching and/or ashing process with adjustable features such as flow control, gas flow control, temperature and power supply control, etching rate, and process start and stop times. Additionally, the system can be configured and customized to meet particular needs or application, such as providing recipe storage for repeatable processes. BALZERS / INFICON LFC 150 offers a reliable and quickly controlled etching and/or ashing process with excellent reproducibility and excellent coverage of both thick and thin sample materials. This unit is user friendly, cost-effective, safe, and provides excellent process results.