Used BALZERS / UCP LFC 150 #9261441 for sale

BALZERS / UCP LFC 150
ID: 9261441
Vintage: 2004
Plasma cleaner 2004 vintage.
BALZERS / UCP LFC 150 is an etcher/asher for the semiconductor industry which is capable of simultaneously performing etch and ashing chemistry operations. It has two independent spray chambers, making it ideal for small to medium sized production runs. UCP LFC 150 features an advanced digital control panel and intuitive user interface; users can easily adjust parameters, monitor system status, and generate process reports. The etcher/asher is capable of depositing single layer or multilayer films onto semiconductor substrates. The average chamber temperatures can be kept within 1°C and high vacuum and ultra-low pressure chemistries can be processed. Using common industry-standard processes such as wet etching or electroplating, BALZERS LFC 150 can process a wide range of metals including aluminum, copper, gold, palladium, silver, and stainless steel. The two integrated furnace chambers offer the flexibility to process advanced materials in temperatures up to 1200°C. Furthermore, LFC 150 is capable of providing an excellent quality finish due to its high speed uniformity and repeatability. The etcher/asher also offers robust remote monitoring capabilities for process optimization and control. The integrated gas delivery system features high-speed pneumatic valves and piezo scales, allowing users to accurately monitor and control the gas flows. Additonally, BALZERS / UCP LFC 150 has an advanced process gas delivery system that allows users to adjust their gas fractions, type, and pressure levels to meet their specific requirements. In addition to its reliability and repeatability, UCP LFC 150 also features safety functions such as active chamber exhaust, remote control interlock protection, and emergency power shut down, making it one of the safest etching/ashing systems in the industry. With cutting-edge technology and advanced features, BALZERS LFC 150 offers reliable, high-quality etching and ashing services and is suitable for a wide variety of semiconductor production processes.
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