Used BRANSON / IPC L3100/3 #197758 for sale

IPC L3100/3 is an advanced dry etcher / asher designed to provide superior etching and ashing performance for a variety of applications. It is integrated with BRANSON patented IsoGrip™ contact technology for precise and repeatable results. The machine is equipped with a powerful high vacuum turbomolecular pump with an ultimate vacuum of 10-6 to 10-7 torr to ensure deep etching of thin film layers and structural components on substrates. The L3100/3 is also integrated with BRANSON / IPC patented IsoGrip Wrap-Around Heater Technology for precise temperature control and uniform heating over a wide operating temperature range. This ensures uniform etching processes and optimized process results. It also contains a high throughput carrier equipment designed to handle up to a maximum of 12 carriers. This reduces user handling and offers improved processing times. The L3100/3 is equipped with a full-featured integrated control system for superior etching and ashing performance. It can be programmed with up to four program steps and 64 independent programmable profiles. This offers maximum flexibility in program customization and process optimization. Its built-in real-time diagnostics and full cycle logging capabilities ensures repeatability and process control. The machine also features both a load lock and a modified load lock. The load lock is designed to maintain an ideal vacuum environment for samples during loading and unloading of the carriers. The modified load lock helps prevent damage to sensitive samples. The L3100/3 is also equipped with both an acid scrub and plasma scrub unit. The acid scrub machine cleans the inside surfaces of the chambers, while the plasma scrub ensures etching of the chamber walls and edges. IPC L3100/3 is a robust and reliable dry etcher/asher designed to provide optimal etching and ashing performance. Its intuitive controls and precise heating technology make it a great choice for advanced etching and ashing applications.