Used BRANSON / IPC L3200 #9201710 for sale
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ID: 9201710
Wafer Size: 6"
Descum plasma asher system, 6"
Dual-chamber
Photoresist stripper combines control capability of single wafer processing
With throughput typical of batch systems
Downstream plasma stripping technology
Low-particulate handling / Processing features
Oxygen-only process ensure high yields
Self-diagnostic
Store up to 26 recipes
Dual-cassette system up to 60 six-inch wafers per hour with minimal particle generation.
BRANSON / IPC L3200 is a full-feature etcher/asher designed to offer the highest possible quality, accuracy, and precision in the etching and ashing of precision components. IPC L3200 utilizes a unique proprietary inert gas injection equipment that enables an accurate and repeatable etch/ash cycle, and offers users a uniform high-quality finish. BRANSON L 3200 has a robust construction including a closed-loop fluid delivery system to minimize contamination, an advanced gas boost control, and an automatic chamber isolation feature that ensures optimal process control. The control unit, which is based on a Windows-based platform, offers full real-time process tracking and precise cycle parameter adjustment. L 3200 features a unique no-touch programmable etching machine, which provides the highest level of accuracy in both the etch and ashing processes. The etching tool uses a patented shape-shifting mechanical arm, which moves to create each etch reliably and accurately. The ashing asset incorporates a state-of-the-art high-pressure fluid injection model, which allows for rapid heat application, short cycle times, and superior process control and repeatability. BRANSON L3200 is an incredibly advanced etcher/asher, which provides the highest quality results in the etching and ashing of precision components. L3200 is constructed with robust and reliable components and incorporates the latest intelligent control systems to ensure consistent high-quality performance. The advanced etching and ashing systems provide high accuracy, precision, and repeatability for a consistent high-quality finish on every cycle.
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