Used CANON / ANELVA DEA-503 #293649682 for sale

CANON / ANELVA DEA-503 is a reactive ion etching (RIE) machine designed specifically for etching semiconductors and other microelectronic materials. The RIE process creates high-precision results by using a plasma created from a chemical reactant and an electrical field to remove material from the substrate surface. CANON DEA-503 is capable of etching both organic and inorganic materials such as silicon, quartz, and ceramics, along with an array of other semiconductors and dielectric layers. The machine has a maximum temperature range of 200 - 600°C and can accommodate substrates up to 200 mm in size and 15 kg in weight. The machine contains several key components, starting with a plasma chamber and two pumps that provide the necessary vacuum and chemical reactant. This reactant can be chosen depending on the material being etched, allowing you to use oxygen, chlorine, fluorine, and other elements. The power source, a frequency-controlled source generator, provides the necessary amount of RF power that is required to create a plasma. The electrodes inside the chamber create a directional electrical field which can be configured depending on the etching application. A pressure measuring sensor also allows the operator to monitor the pressure balance in the plasma chamber. The advanced software included with ANELVA DEA-503 provides an intuitive user interface that allows users to quickly modify settings or adjust parameters. Automation functions such as auto-stop, auto-start, and auto-tune are also included to make etching processes more efficient. Furthermore, the user interface provides a wealth of diagnostic data that can be used to troubleshoot any problems during the etching process. DEA-503 is one of the most reliable and accurate etching machines on the market. It's designed to provide superior results in both accuracy and precision on a wide range of materials. With its intuitive user interface and advanced automation functions, it's well suited for different industrial etching applications.