Used CANON / ANELVA I-2100 SRE #293666068 for sale

CANON / ANELVA I-2100 SRE is a high precision etcher/asher developed to meet the needs of advanced surface treatment for both industrial and research applications. This unit is equipped with state-of-the-art features and is capable of producing high quality etched or etched/polished surfaces with exceptional accuracy and repeatability. CANON I-2100 SRE contains a high-pressure vacuum capability to both etch and asher, two independent gas flow systems, and a computer-controlled lighting equipment. It also has an ion beam generator, and an automatic control system that ensures uniform gas pressure and temperature across the process area. Combustion gases used within the process chamber are monitored for accurate pressure control, and a computer is linked for data logging, processing, and process control. ANELVA I-2100 SRE has a wide range of etching and ashing materials available, including Si, Al2O3, Cr, Ta, TiC+Si, TiN+Si, and many others. It is designed to etch and asher through the utilization of pre-programmed parameters, operating With a wide range of settings suitable for various application requirements. In addition, I-2100 SRE has an integrated arc suppression unit to help protect the process chamber from degradation due to sputtering. The machine also has the capability to be integrated with external systems such as an ICP tool to enable in-situ etching. CANON / ANELVA I-2100 SRE also has various optional features available such as crystal deflection control, a secondary gas inlet, an exhaust outlet, and an additional bell jar. These are designed to help improve process yields and keep the process chamber clean. Finally, CANON I-2100 SRE is a reliable and robust etcher/asher with excellent safety features, a low maintenance design, and ease of operation. The unit is available in both manual and computer-controlled versions with a variety of optional features. Its overall performance is often superior to that of other etchers/ashers.