Used CANON / ANELVA I-4100 SVII #9158755 for sale

CANON / ANELVA I-4100 SVII is an etcher-asher designed for precision plasma etching, ashing, and wafer processing. This is a highly efficient instrument that has become a leading choice for semiconductor wafer processing for many applications. The instrument features a modular design for maximum flexibility, allowing for four chambers to be connected in sequence without the need for extensive re-connecting of wiring. The four chambers are connected to an intuitive control equipment, allowing for automated processes to be created and monitored effortlessly, ensuring accuracy and uniformity in each process. The instrument features a fully space-conserving design, which allows for limited space without sacrificing performance. The etcher-asher is equipped with a High Frequency Drive (HFD) and a High Voltage Power Supply unit (HVPS). The HFD runs at 500kHz giving the instrument the power to perform a variety of plasma processing applications on a range of wafers. The system also has a Uniform Processing Unit (UPS) which allows for uniform plasma processing over a range of wafers. CANON I-4100 SVII is designed with safety and maintenance in mind, with a built-in Safety Probe and Reverse Control Machine that monitors the sequencing and status of the etcher-asher. A range of accessories makes this instrument kind to the environment, with a special venting tool eliminating waste gasses and fumes from the working area. The design of this etcher-asher allows for accurate and reproducible processes, reducing variation from part to part. The instrument features an advanced software asset, which allows for custom set-up, synchronization and control for each process. With the ability to automate processes and limit time wastage, ANELVA I-4100 SVII is an ideal choice for semiconductor wafer processing.