Used CANON / ANELVA ILD 4003M #9111256 for sale

CANON / ANELVA ILD 4003M etcher / asher is a high-performance dry etching equipment that is suitable for a variety of industrial micro manufacturing applications. It is designed for micro-structuring and micromachining of various materials, including silicon, thin films, etc. The system uses reactive ion etching (RIE) to create high-aspect ratio microstructures. CANON ILD 4003M features a long lifecycle, efficient and reliable performance, and low material consumption. ANELVA ILD 4003M can achieve lower ion energy than traditional systems thanks to its high-vacuum thermal etching capabilities. It uses magnetron-based "cold" source technology, which ensures efficient ion beam deposition on the substrate surface. The unit is equipped with a wide range of process preconditioning parameters and features for pre- and post-processing steps that include oxygen cleaning, hard mask deposition, glossing, etching, and metal etching. ILD 4003M's integrated process frequency control (IPFC) and plasma focusing are designed to enhance reactive ion etching and enable greater precision, resulting in high quality and repeatable device features. Additionally, CANON / ANELVA ILD 4003M offers excellent etch uniformity, small feature size, and high etch rate. It also supports a range of etching gases, including argon, carbon dioxide, oxygen, and hydrogen. CANON ILD 4003M provides a wide range of process conditions, ensuring compatibility with a variety of applications, including lithography, 3D forming, MEMS, and other microfabrication processes. It features an intuitive LCD touch panel interface for easy operation and management of the etching process. Additionally, ANELVA ILD 4003M has a built-in remote monitoring function that helps to ensure efficiency and minimize downtime. Overall, CANON ILD 4003M is an ideal etching machine for achieving high quality microstructures in a wide variety of applications. The tool's cutting-edge features and advanced technologies make it a reliable and powerful tool for industrial microfabrication.