Used CANON / ANELVA ILD 4015 #9226110 for sale

CANON / ANELVA ILD 4015
ID: 9226110
Wafer Size: 6"
Oxide etcher, 6".
CANON / ANELVA ILD 4015 is a versatile etcher and asher that is designed to suit the needs of modern production facilities. It produces high quality etched tools for use in a variety of industrial processes. The equipment takes advantage of its large working platform, advanced thermal system, and intuitive graphical interface. CANON ILD 4015 is a high-precision etcher/asher. It has a working platform of 400 x 250 mm and a maximum field size of 400 x 250 or 300 x 300 mm. This machine is able to accommodate a wide range of workpieces such as flat square, flat round, small flat, and long round shapes with a maximum thickness of 8 mm. The working table is motorized and can be driven in X, Y, and Z-axis. The unit has a fast acceleration and deceleration speed of 45 m/min and has a moving speed of up to 0.6 m/min. ANELVA ILD 4015 can etch with a maximum rate of up to 20 µm/min. It also offers a variety of etching parameters such as pulse width, wavelength, repetition frequency, and pulse duration to tailor the etching process according to the customer's needs. Additionally, it has a built-in laser safety machine that can protect personnel from accidental exposure. ILD 4015 is equipped with a thermal tool for ashing workpieces. It also features a temperature sensor that allows for precise control of the ashing rate. It has a temperature range of up to 800 °C and is equipped with an integrated PC-based controller for precise process control. CANON / ANELVA ILD 4015 also has an intuitive graphical user interface (GUI) which makes it easy to operate. The asset has several warning lights to indicate the current status of the machine and allows for easy customization of the settings according to the customer's needs. The model can be connected to the internet for remote monitoring and maintenance. CANON ILD 4015 is a powerful and versatile etcher/asher for modern industrial production. It has a large working platform with fast acceleration and deceleration speed and can etch with a maximum rate of 20 µm/min. This machine also has temperature sensors to precisely control the ashing rate and is equipped with an intuitive graphical user interface. The equipment can be connected to the internet for remote monitoring and maintenance. With ANELVA ILD 4015, production facilities can shoulder the responsibility of creating high-quality tools with ease.
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