Used CANON / ANELVA ILD 4015 #9390493 for sale

CANON / ANELVA ILD 4015 is an etcher/asher, or Vapor Etch Asher, in which vapor etching or etchant plasmatic etching is performed on specimens during research and development, before production runs or for laboratory testing. This device operates on metal-organic gases, which are drawn in from outside the chamber and then heated to create a plasma. The resulting plasma is used to etch or asher specimens inside the device. CANON ILD 4015 is a powerful tool for the etching and ashing of a variety of materials, including metals, polymers, and semiconductors. ANELVA ILD 4015 utilizes an advanced Floating Electrode Technology (FET) ashing principle, which heats the metal-organic gases to create a plasma for etching and ashing. The floating electrodes are located at different distances from the material to be etched and enables a uniform distribution of the plasma during the process. The FET system also gives unsurpassed uniformity in both etching and ashing times. With this technology, a localized area or selective etching can be achieved. ILD 4015 is equipped with an electrostatic chuck, which enables the precise placement of wafers prior to ashing. It can treat rectangular specimens up to 200 mm x 300mm in size, and can process a maximum of five units per batch. Also, CANON / ANELVA ILD 4015 is equipped with powerful vacuum pumps, providing a base vacuum of 3 x 10-6Pa. CANON ILD 4015 is a digital etcher. It comes with an on-board microprocessor and a user-friendly touch screen interface. The digital display shows the pressure, temperature and time during the etching or ashing process, allowing for precise control over the process conditions and chamber atmosphere. In conclusion, ANELVA ILD 4015 is a high-performance etcher/asher, equipped with advanced technology and intuitive user-friendly controls. It enables the efficient etching and ashing of a variety of materials, while providing precise control over the process. The versatility and performance of ILD 4015 makes it a useful tool for any research or production laboratory.