Used CANON / ANELVA ILD 4033 #9257787 for sale

CANON / ANELVA ILD 4033
ID: 9257787
Wafer Size: 6"
Vintage: 1994
Oxide dry etcher, 6" 1994 vintage.
CANON / ANELVA ILD 4033 is a compact, powerful, reactive ion etcher (RIE) / asher utilizing inert gas technology. It is a single-wafer equipment, consisting of a main chamber that houses the substrate, an internal process chamber, and an external chamber for delivery of the inert gas used in the etching process. The system is designed for etching of a variety of materials, including silicon, metal films, and other semiconductor materials. CANON ILD 4033 is capable of accurately etching material with precise control and uniformity. The process chamber contains a fine control unit to maintain uniform etching depth and an adjustable etch chamber pressure to control the etching time and temperature. The machine is also capable of very high etch rates and has a high tolerance for shadowing effects due to differing etch rates of different materials. ANELVA ILD-4033 is equipped with an on-board controller, allowing the user to program the etching process, store up to 99 process programs, restart interrupted or incomplete processes, and adjust set parameters during operation. The main chamber is also equipped with quartz windows to allow visualization of the etching process. ILD 4033 utilizes an RF power supply and ICP (Inductively Coupled Plasma) to generate an atmosphere ideal for etching. The tool is capable of generating ICP plasma with cold-wall electrode techniques, RF bias, and AC/DC power supply capabilities. The main chamber is designed to generate high plasma densities and maintain stable conditions throughout the process, allowing for precise and reproducible etch depths. ILD-4033 is equipped with an advanced safety asset. The model is equipped with an explosion-proof door and a series of safety switches to prevent accidental exposure to the etching chemicals. The process chamber has been designed to prevent particle generation and external damage to the equipment. Additionally, an ambient environment sensor continually monitors the internal environment to ensure safe operations. In conclusion, ANELVA ILD 4033 is a powerful, reactive ion etcher / asher utilizing inert gas technology to etch materials with precision and accuracy. Its advanced safety features and on-board controller provide the user with an efficient and reliable etching process.
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