Used CANON / ANELVA ILD 4033 #9390491 for sale

CANON / ANELVA ILD 4033
ID: 9390491
Wafer Size: 6"
Vintage: 1994
Dry etcher, 6" 1994 vintage.
CANON / ANELVA ILD 4033 is a reactive-ion etcher, or Asher, that uses Ionized Cluster Deposition (ICD) Technology. It is a customizable machine designed to provide precise etching of high-aspect-ratio and hard materials in a reliable and economical way. It is used for etching of metals, ceramics, glasses, semiconductors, and a variety of other electrical and industrial components. CANON ILD 4033 utilizes a magnetically shielded radio-frequency (RF) processing chamber with permittivity-controlled DC energizing power supplies. The electron gun is typically an ion source of various sizes, which selectively fires highly energetic electrons at various materials surfaces. An electron beam is then formed in the process chamber with a beam size of up to 8mm in radius. This maximizes the control of the deposition, etching, and oxide layers. ANELVA ILD-4033 is commonly used for a variety of applications, including etching delicate structures into metals and other materials. It is designed to etch with precision, producing clean and exact etching with virtually no cracking or chipping of the material. It can etch features as small as 80 nm wide, which is beneficial for creating intricate and detailed components. CANON ILD-4033 is outfitted with several safety features to ensure optimal safety when in use. Some of these features include a safety interlock system that prevents unauthorized personnel from accessing the chamber, over-pressure sensors with alarms, and an emergency button that quickly shuts down the system in case of emergencies. The etcher can be equipped with several accessories that make it more effective and efficient for the user. Automated wafer loaders ensure that the etching process is streamlined and uniform, while a process controller allows for easy adjusting and monitoring of the parameters. Overall, CANON / ANELVA ILD-4033 is a reliable and economical solution for the precise etching of high-aspect-ratio and hard materials. With its customizable features, safety features, and useful accessories, it provides a reliable and efficient etching solution for users of all skill levels.
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