Used CANON / ANELVA ILD 4100 SVII #293654386 for sale

CANON / ANELVA ILD 4100 SVII is an etcher / asher that uses inductively-coupled plasma (ICP) technology to achieve high accuracy control of the etching/ashing process. The equipment is designed for use in a vacuum chamber, allowing for potential compatibility with other processes. CANON ILD 4100 SVII is capable of processing a wide range of materials with excellent etching/ashing performance and surface quality. The primary feature of the system is the ICP source and associated power supplies. These power supplies generate and control the ICP, which is used to etch/ash the target material. The ICP generates a non-contact cleaning mechanism, where ions composed of the plasma species impinge on the surface of the material, resulting in the decomposition of the target material and the removal of material. This process also results in a high degree of uniformity in the etched/ashed surface. In addition to the ICP source and power supplies, ANELVA ILD 4100 SVII also features an integrated gas supply unit, allowing for precise control of the plasma species and their interactions with the process substrate. The machine also features a high vacuum turbo pump, allowing for the maintenance of a low vacuum state for optimal etching/ashing performance. ILD 4100 SVII also features multiple ICP process configurations, allowing for greater flexibility for a wide range of etching/ashing applications. The tool's features and parameters, such as pressure, gas flow and ILD gas concentration, can also be adjusted with precision and are displayed and controlled through the graphical user interface (GUI). This allows the user to accurately control the etching/ashing process and maintain high quality results. CANON / ANELVA ILD 4100 SVII also offers a variety of safety and security features, such as the built-in device monitoring asset, which provides information to the user such as vacuum level and temperature of the model. Overall, CANON ILD 4100 SVII is a highly advanced etcher / asher with a multitude of features that enable high performance etching/ashing. The equipment is capable of processing a wide range of materials, with excellent etching/ashing performance and surface quality. The system is also equipped with multiple ICP process configurations, integrated gas supply unit and high vacuum turbo pump for optimal etching performance and precision control of the etching/ashing process. ANELVA ILD 4100 SVII also offers a variety of safety and security features, giving the user the opportunity to achieve maximum performance from the machine.