Used CANON / ANELVA ILD 4100SR #293637503 for sale

CANON / ANELVA ILD 4100SR is a versatile industrial etcher or asher, capable of handling large batches of substrates or wafers with superior results. Ideal for wafer dicing, die attach, and IC packaging applications, CANON ILD-4100SR features direct-plasma source, special dry etch/strip technology, and simultaneous etching of both sides of the wafer. ANELVA ILD-4100 SR utilizes proprietary ILD (Ionized Line Direction) technology to ensure superior process results. The primary benefit of this technology is the uniformity of etching over the entire surface of the wafer. This technology also eliminates impurities in the plasma created by the interaction of the plasma with the wafer's surface. The precise, precise etching of the ILD technology also helps to produce precise, repeatable results without need for manual adjustments. ILD 4100SR is a high-performance industrial etcher, capable of etching and stripping processes to depths up to 7µm in all common semiconductors. The system is capable of processing substrates up to 200mm in diameter, making it suitable for wafers in the 0.25-3.5mm range. The integrated micro-etching (MIL) and strip capabilities of the system offer superior performance in all typical etching operations, such as copper, gold and aluminum. CANON / ANELVA ILD-4100 SR offers a great number of automation features, including computer interface and external process timer. This allows for fast, repeatable and precise etching results. The system also features automatic temperature and power control, allowing for precise and repeatable temperature control. ILD-4100 SR is compliant with industry standards of environmental safety, and has been certified by the European Union for compliance with EU RoHS (Restriction of Hazardous Substances) regulations. This etcher is also compatible with a full range of accessories and chemicals, including vacuum compartment, electrochemical plating, thick film lithography, and slot etching. CANON ILD-4100 SR is a well-rounded, rugged industrial etcher, capable of handling large batches of substrates or wafers with precision and utmost safety. Its unique ILD technology ensures uniform etching results, and its integrated automation features allow for fast, precise and repeatable results. With its industry-standard certification and wide range of compatible accessories and chemicals, ILD 4100 SR is an ideal choice for high-volume industrial etching applications.