Used CANON / ANELVA ILD 4100SR #9227368 for sale

CANON / ANELVA ILD 4100SR is a high-performance etcher / asher designed for applications in the semiconductor industry. The device utilizes the latest inert gas techniques for ideal etching or ashing of wafers, MEMS devices, and other substrates. CANON ILD-4100SR is equipped with the latest N2O2 control technology for precise and repeatable etching and ashing results with little to no surface damage. The device features excellent compatibility with a wide variety of fluoride and acid based etching/ash etching agents as well as carbon dioxide for ashing of Silica and Silicon. The equipment provides excellent resolution and precision with repeatable results and improved surface finish. Its integrated enclosure enables the use of advanced gas delivery methods conjoined with Smartstream cooling for superior uniformity results. ANELVA ILD-4100 SR is also equipped with a variety of process control functions including an internal pressure, flow, and temperature control for precise etching/ashing of different wafer types. The device operates on a high frequency power supply that can handle up to 60MHz in normal mode. This allows for precise and accurate control over the etching/ashing process. Along with the high frequency power supply, the system features a variety of other advanced components, such as a microprocessor-controlled chamber pressure controller and a high efficiency electro-magnetic discharge unit. ILD 4100SR also comes with a variety of safety features including a self-locking door, built-in fire suppression machine, over-temperature alarm, and an emergency shutdown tool. In addition, the asset also comes with secure communications protocols and data encryption built in for securely transmitting and receiving data to and from the device. Overall, ILD 4100 SR is an excellent etching/asher device. It provides an exact, repeatable, and safe process for etching and ashing of a variety of wafer substrates and MEMS devices. The latest inert gas techniques, along with the built-in safety features, make the model suitable for a wide variety of applications.