Used CANON / ANELVA ILD 4100SR #9238858 for sale

CANON / ANELVA ILD 4100SR
ID: 9238858
Oxide dry etcher.
CANON / ANELVA ILD 4100SR is an ICP etching machine used for high-precision surface processing. It is a multi-functional device that can be used to perform both lithography and etching processes, making it a versatile tool for medical, chips manufacturing, and optical components industry. The machine operates using an ionized gas combination of CF4, CHF3, and SF6 for the etching process. These gases are released through the metallic needle with plasma obtained from an ICP power supply. The needle is then scanned on the sample in order to evenly etch the desired pattern or surface. CANON ILD-4100SR has a large etching area of up to 400 mm by 400 mm and an etching depth up to 10μm, with high-precision and repeat accuracy up to 0.5μm. Its compact design allows easy installation and integration into existing systems and it also has a shorter machining time, which increases productivity and reduces the waste of materials. The unit features a high-resolution viewing equipment which allows the users to monitor the etching process in real-time. It also has a high-precision auto-leveling system which ensures that the etching needle is correctly adjusted and aligned during the operation. ANELVA ILD-4100 SR is equipped with high safety features, such as arc detection, cooling water quality management, a nitrogen membrane, and a spark detector, which all contribute to a safe working environment. The unit is also configured to allow remote operations as well as manual control for maximum control and flexibility. The machine is constantly monitored for accurate and reliable results, and it can be integrated with other CANON equipment for even greater efficiency. Overall, ILD-4100SR is a reliable and reliable etching solution for precision processing. Its wide range of features and options make it suitable for a variety of applications and industries and its high safety standards guarantee a protected working environment. This etching machine is easy to install and operate and provides high-precision and repeatability for superior performance.
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