Used CANON / ANELVA ILD 4100SR #9374945 for sale

CANON / ANELVA ILD 4100SR is a state of the art etcher / asher designed for the targeted etching and ashing of thin film substrates. It is a comprehensive machine capable of both wet or dry etching and ashing. It features a higher process speed than comparable machines, which allows for efficient, thorough etching and ashing of sensitive substrates. CANON ILD-4100SR is suitable for both dry and wet etching and ashing of any processable substrate. It is capable of etching and ashing a variety of metal layers, such as Aluminum, Nickel and Copper with uniformity and maximum efficiency. It features horizontal and vertical movement control, allowing for precise and quick etching and ashing of highly substrates in a short time period. ANELVA ILD-4100 SR is equipped with an exhaust gas scrubber which prevents hazardous chemicals from being released during the etching and ashing process. This feature ensures that the etching and ashing process is completed quickly and safely. Additionally, CANON / ANELVA ILD-4100SR is equipped with a CCD camera for precise imaging of the substrate surface during etching and ashing processes. ILD-4100 SR also features a digital pressure sensor, monitoring the process atmosphere and substrate temperature to help optimize etching and ashing results. This allows for precise etching and ashing parameters to be set precisely for each unique process, ensuring maximum process outputs. CANON ILD 4100SR is a reliable and precise etcher / asher, suitable for different processes and substrates. It is an excellent choice for anyone in need of advanced substrate etching and ashing systems, and can help increase process yields and reduce operational costs.