Used CANON / ANELVA ILD 4100SR #9412378 for sale

CANON / ANELVA ILD 4100SR
ID: 9412378
Wafer Size: 8"
Vintage: 1996
Oxide dry etcher, 8" 1996 vintage.
CANON / ANELVA ILD 4100SR is a state-of-the-art etcher/asher capable of performing high-precision microstructuring of surfaces. This advanced equipment is designed to achieve excellent repeatability and uniformity while producing superior quality etch patterns. CANON ILD-4100SR utilizes a plasma DLC (Diamond-Like Carbon) etching process to create extremely flat surfaces with excellent edge definition and low surface roughness. It is a fully automated equipment that provides excellent control over the etching parameters to ensure consistent results. ANELVA ILD-4100 SR is primarily used for micromachining and is especially well-suited for production processes that require high throughput and precision. The machine can be configured with a standard laser head that is capable of creating microstructures with excellent edge quality, along with features such as pixel-level resolution, high selectivity and high accuracy shape control. Other laser heads are available to tailor the machine to specific applications, such as deep etching and complex geometries. CANON ILD 4100 SR is built with a patented electro-magnetic braking system that provides precise control over the etching process and ensures repeatable performance. The unit is also equipped with an integrated vision machine for feedback control over the etch intesity. With its advanced low-pressure chamber and thermocouple feedback loop, ILD 4100 SR is able to maintain extremely stable conditions during the etching process, resulting in excellent uniformity and repeatability. In addition, the tool offers advanced safety systems such as vacuum and oxygen sensors that detect any potential dangers and shut down automatically when hazardous conditions are detected. ILD-4100SR also includes a device control interface with macro programming and a touch-screen display that enables easy control and monitoring of the etching process. CANON ILD 4100SR is the perfect choice for production processes that require high-precision microstructuring with excellent repeatability and uniformity. With its sophisticated controls and advanced safety features, it is an ideal choice for precision applications, providing results that are consistent and reliable.
There are no reviews yet