Used CANON MAS 8220 #9157615 for sale

CANON MAS 8220 is a tandem-axis electrochemical etching / ashing equipment capable of processing up to 30 wafers simultaneously. It is suitable for a variety of etching and ashing processes. The system employs a two-stage etch process, which includes pre-etching and post-etching (respectively) which is designed to ensure precision etching of high-aspect ratio structures. The pre-etch is tailored to enable the creation of deep and accurate high-aspect ratio structures. An intuitive software control unit is included for operation and to monitor the etch and ashing processes. CANON MAS-8220 is built with a dual high-performance, independent etching and ashing vessels, each of which has its own dedicated power supply. The power supply distributes: a direct current, alternating current, and pulsed direct current, controlled separately to each vessel. This allows precise power control for each vessel, maintaining a stable etch rate and an appropriate etch rate transition. The etching parameters are customizable, including etching variables, such as process time and temperature, as well as, etching reagents, concentrations, and additional catalyst reagents. MAS 8220 has an innovative filtration machine which uses high-precision filters to ensure the reagents are free from any particulates. The filtration tool also serves to recycle the reagents and extend the life of them. Additionally, the asset has a built-in chemical cooling and heating model which helps maintain the temperature balance during the etching process, controlling the process temperature. MAS-8220 includes an up to 99 programmable process modes, enabling maximum process flexibility and tailored process control. The equipment is also designed so that it can be used in wet benches or in a fume hood, allowing for optimal user safety. The system also provides a wide range of process control options, from simple manual settings to fully automated process sequences. Additionally, the unit's software can be programmed to monitor and maintain the desired etching parameters. CANON MAS 8220 enables laboratories and production facilities to achieve a high level of precision and accuracy for a range of applications including: semiconductor devices lithography, thin film device processing, MEMS device fabrication, bio-chemical applications, and more. The machine's intuitive operation and precision etching capabilities make it an ideal choice for advanced users in demanding industrial and laboratory environments.