Used CHEMCUT 610 #149017 for sale

CHEMCUT 610 is a highly efficient, mid-sized, Chemical Mechanical planarization (CMP) equipment for use in the electronics and semiconductor industry. The system is specifically engineered for the etching and ashing of dielectrics, including silicon dioxide, silicon nitride and low-k dielectrics. It has a broad field size of up to 330mm and a throughput of 12 wafers per hour. 610's design makes it easier to achieve good planarization with high levels of precision and repeatability. It has advanced features, including a pressure-balanced frame, which ensures a consistent etching depth across the entire area; as well as a synchronized high pressure rinsing unit that provides superior CMP cleaning. CHEMCUT 610 also has a closed-loop control machine and software suite that ensures process accuracy, allowing customers to etch critical layers of dielectrics with the highest degree of repeatability and accuracy. 610 is built with user-friendly operation and maintenance features to reduce downtime and increase productivity. It features an intuitive graphical user interface, as well as an automatic calibration process that enables accurate process optimization for both etching and ashing of dielectrics. It is also equipped with two-stage DI/DI cascading filtration to ensure clean process liquid and prevent contamination. In addition, CHEMCUT 610 has a robust and reliable design that ensures efficient and trouble-free operation for long periods of time. It is designed to handle a wide variety of chemically aggressive or hazardous chemicals, including fluorine-based etch and dry etch gases. This allows customers to create highly complex and intricate structures with the utmost confidence. Overall, 610 is an excellent product that provides superior etching and ashing of dielectrics at minimized cost. It is simple to use, yet offers advanced capabilities, making it an ideal choice for semiconductor and electronics companies with demanding etching and ashing demands.