Used CI SCIENCE Torus 200 #293585731 for sale
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CI SCIENCE Torus 200 is a powerful etch/ash equipment from Confluence International, Inc. It is capable of handling substrate sizes up to 200 mm and features a top-down, cylindrical convection chamber for etching, an x/y/z platform for precise substrate positioning and movement, a motorized lid for efficient and safe waste disposal, and proprietary software for process automation. The system provides users with the capability to select from single or double sided etching, as well as the option to select from standard and user-defined process recipes. The unit can be used for etching and ashing with a variety of substrates, including Crystal Polycrystalline Silicon (CPS) substrates, which are often used in combination with high-energy ion beam instruments and beam lithography. Torus 200 is designed to accommodate substrates of various sizes, with a programmable substrate holder providing controlled, precise motion along the x and y axes. Furthermore, the high temperature capability of CI SCIENCE Torus 200 enables high-efficiency etching and ashing of aluminum, titanium, stainless steel and other materials. The machine is equipped with an internal blower providing turn-down isolation, an externally mounted condensate tank, high-efficiency filtration, and a remote purge/vent port for automatic evacuation. Additionally, safety features include a remote manual gas shutoff switch and a panel-mounted emergency stop switch. Additionally, a four-wire interface connection available on the back of the tool enables remote control, allowing users to access etching and ashing functions through a PC or any other compatible external device.
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