Used CI SCIENCE Torus 300K #9373223 for sale
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CI SCIENCE Torus 300K is an etcher/asher specifically designed for high-throughput semiconductor processing. This equipment is capable of processing up to 300 wafers per batch, allowing for a rapid processing of multiple devices at the same time. The main components of this system are the process chamber, the particle measurement unit, the temperature control, and the microcontroller. The process chamber is designed to minimize surface contamination with a series of filters, while the particle measurement machine helps ensure that the wafer is free of any particles before being processed. The temperature control is necessary to control the temperature of the tool and it utilizes an advanced PID control algorithm to achieve a high level of accuracy. The microcontroller is used to control the whole asset, allowing for precise control of all of the components. The model is equipped with a high-frequency RF generator, allowing for the achievement of high-aspect ratio etching, and the use of an optional programmable source allows for the generation of complex profiles for repetitive processes. This equipment is also equipped with a multi-zone exhaust system, allowing for improved cleaning of the vacuum chamber after each process run. The unit is also equipped with an optional microscope, allowing for visual inspection of processed wafers before they are shipped out. Additionally, the machine offers an automatic scheduling and logging tool, allowing for easy tracking and analysis of processes. The flexibility of the asset allows for the utilization of both wet etch and dry etch processes with one single machine, and its low-cost maintenance makes Torus 300K an ideal choice for any high-throughput environment. With its efficient design and reliable performance, CI SCIENCE Torus 300K provides an unbeatable value proposition for any semiconductor fabrication process.
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