Used CI SCIENCE Torus 300K #9402271 for sale
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CI SCIENCE Torus 300K is an advanced electron-beam lithography equipment, built for industry-grade etching and ashing applications. This system features a unique combination of features, covering a broad spectrum of etching requirements, from ultra-high resolution to high productivity. The unit is comprised of a powerful medium-energy electron gun, a multi-axis stage, a highly-sensitive optical imaging component, and a sophisticated computerized control machine. The gun produces high-energy beams that impact the surface of the substrate material being etched, creating tiny jagged incursions. The image component captures the line patterns generated by the beam and the multi-axis stage allows for precise positioning of the beam to create a pattern. Torus 300K can achieve line/space resolution down to 10 nanometers in etching and 5 nanometers in ashing. It also boasts pulsing capability for optimized etching and a variable pass tool for producing multiple layers at different depths in one pass. The included computer asset includes special software for programming customized patterns and automated processes, ensuring swift and accurate etching, as well as excellent repeatability over multiple runs. This model is suitable for a range of applications, from MEMS and other micro-scale fabrication to 3D printing. It is incredibly versatile and is a formidable tool both for research and for commercial production. CI SCIENCE Torus 300K also has a pressure chamber attached for operation in vacuum and other similar low-pressure environments. All in all, it is a powerful and advanced tool designed to meet any etching and ashing requirements.
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