Used CORIAL 300 iL #293634078 for sale

CORIAL 300 iL is a compact, high throughput, and low-cost reactive ion etching (RIE) asher equipment. 300 iL uses proprietary AC frequencies with a wide range of parameters allowing a wide range of applications. The system has a high-aspect ratio etch capability with excellent process repeatability and superior wafer handling. CORIAL 300 iL offers the flexibility of processing all available materials, including, but not limited to, polymers, metals, nitrides, oxides, and dielectrics. This advanced atomic-scale etching unit has an intuitive graphical user interface with comprehensive recipe building capabilities, allowing users to customize their own etch recipes. It also features a visual wafer mapping and automatic wafer tracking machine, improving repeatability and eliminating the need for manual process control. 300 iL has a fast, high quantum efficiency and low-voltage (0- 1 V) ion gun microwave generator for precision etching capabilities. CORIAL 300 iL comes equipped with a high-performance turbo pump, capable of achieving a vacuum of 5x10-7 torr for superior etch rates. It also has a particle filtration tool to ensure the highest levels of cleanliness. The built-in safety features include a gas leak detector, pressure overload interlock, and fire and gas safety switch, providing a secure operating environment. Additionally, 300 iL offers multiple process recipes and refurbishing options, and is expandable with up to three chambers. CORIAL 300 iL is an ideal reactive ion etcher/ asher for mass-producing high-tech components, such as MEMS and other microdevices. It is simple to operate and has consistent performance, making it an invaluable tool for industrial R&D and production facilities.