Used CORIAL 300 iL #293695744 for sale

CORIAL 300 iL is a high-performance etching and asher equipment. It is designed to provide outstanding flexibility and a wide range of capabilities for various etching and ashing applications. The unique design of 300 iL is particularly suitable for etching and ashing of various materials, ranging from steel to glass, ceramics and semiconductor substrates. The system is equipped with advanced optical and dry etching technologies, providing superior unit architecture and process control. CORIAL 300 iL features a plasma source that enables a wide etching window from low to high rf-powers. The rf-source is permanently integrated into the machine, providing fast and easy tool activation and recipe set-up using a dedicated control software. 300 iL is also capable of rapid thermal annealing processes. It features a hot-plate, heated up to 700°C combined with a quick response time. This allows for a temperature stabilization and improved process repeatability. The Asset also features high opacity protection filters, shielding the optical elements during etching and ashing. This ensures model durability, minimizing maintenance costs for the operator. The reduction of volatile organic components (VOCs) is also one of the key features of CORIAL 300 iL. The closed process chamber allows for a higher level of process automation and a reduction of solvent based post-cleaning processes. The equipment is also equipped with remote diagnostics and remote service functions, enabling high uptime and reduced maintenance costs. 300 iL offers a wide range of ICP-CF4-etched profiles and etching uniformity. Its user friendly operation and powerful process control capabilities make it a suitable tool for a wide range of etching and ashing applications.