Used CORIAL 300 iL #293818173 for sale

CORIAL 300 iL
Manufacturer
CORIAL
Model
300 iL
ID: 293818173
Inductively Coupled Plasma (ICP) etchers.
CORIAL 300 iL is a high performance etching and ashing equipment designed for precision thin film processing. This system is designed to achieve the highest levels of precision in the etching and ashing process, while maintaining excellent process control. It has a high-energy focused ion beam (FIB) source to provide a precision stream of beam ions to the substrate. The FIB also enables a wide variety of materials such as gold, copper, graphite, and silicon to be processed with excellent accuracy. In addition, it features a patented Advanced Recipe Technology (ART) that enables patterning with high positional accuracy. For ashing, 300 iL utilizes microwave RF and a quickly heatable Etch Chamber to provide fast and efficient removal of photoresist and other materials. The unit also has a highly efficient cooling machine to ensure that the etch or ash process is completed at the ideal temperature for optimal performance. Furthermore, CORIAL 300 iL is capable of operating in multiple modes including parallel etching and ashing, sequential etching and ashing, and high etching rate. This flexibility makes it ideal for applications such as the fabrication of fine-line patterns and device structures in microelectronics. Furthermore, the tool offers an easy-to-use graphical user interface (GUI) for controlling each process step, and is equipped with a powerful microprocessors and an onboard computer to enhance real-time process control. 300 iL is a reliable tool for executing precision etching and ashing processes. Its combination of high ion beam intensity, fast microwave ashing, reliable cooling asset, and advanced Recipe Technology ensures reliable process control and excellent uniformity. In addition, the model is completely configurable and able to adapt to the changing requirements of modern fabrication processes.
There are no reviews yet