Used CORIAL 300 iL #9267214 for sale

CORIAL 300 iL is a high performance etcher / asher for a wide range of microelectronic applications. The etcher / asher is designed to meet various photoresist etching requirements, utilizing a variety of materials and etches that include aluminum, tungsten, polyimide, copper, and silicon. 300 iL can be used to process substrates up to 750mm in size, with process temperatures up to 200°C and propellant pressures up to 850 mbar. The etcher also features precise temperature control, allowing processing accuracy up to ± 0.03°C. The modular process chamber design ensures reliable, high-quality results, with uniformity criteria of +/- 0.9 percent loading, and full nitride isolation for excellent thermal performance, leading to an improved etch quality. CORIAL 300 iL has a rugged construction and is suitable for long-term use, with a round-robin configuration for independent processing areas that can be simultaneously employed for different substrates and etches. The etcher also has an isolated FPT switchable gas feed panel which allows for rapid gas changes, minimising downtime. 300 iL is equipped with a full suite of user-friendly process software, making commissioning and expert operation easy and convenient. The process control software includes integrated process recipes, effective cycle time optimisation, universal parameter mapping, and advanced flow control. CORIAL 300 iL is an advanced etcher / asher with excellent process performance and reliability that make it suitable for high-end industrial and research applications. It offers a high degree of flexibility and functionality for the etching of substrates including silicon wafers and MEMS components.