Used CORIAL 300 iL #9272935 for sale

CORIAL 300 iL etcher/asher is designed for high throughput applications and offers excellent transfer characteristics. It features a wide 300 millimeter process chamber with 8 load locks and is equipped with 24 wafers adapter robot for convenient wafer loading and unloading. 300 iL is also equipped with multiple communication interfaces for process interfacing and flexible recipe configurations, making it adaptable to a variety of etch and ashing processes. CORIAL 300 iL is engineered for high precision processes and is designed with a number of automatic features that ensure consistently high etch uniformity. Its advanced motor control system ensures high speed and accuracy with minimal vibration and thermal distortion. The high throughput rates enable shorter process times and higher overall throughput. 300 iL supports various process gases and chemicals such as Oxygen (O2), Nitrogen (N2), Carbon dioxide (CO2), Argon (Ar) and Silane (SiH4). CORIAL 300 iL is fully automated, with automatic control of pressure, temperature, and vacuum. It is equipped with an automatic gas flow control system for precise and repeatable dynamic control during the etching and ashing processes. The chamber design allows easy access to the process chamber and provides effective containment of gases, making it safe and efficient to use. 300 iL also offers reduced process measurements as well as minimized downtime. It incorporates a number of safety features such as pressure and leakage monitoring and can be integrated easily into existing production environments. The system's multiple communication interfaces provide easy communication between other systems and with the host computer, enabling efficient automatic process control. Overall, CORIAL 300 iL etcher/asher is an excellent choice for users looking for high precision etch and ashing processes. Its advanced features ensure consistently high etch uniformity and significantly reduce process times and downtime. In addition, its multiple communication interfaces enable easy integration into existing production environments and provide efficient automatic process control.