Used CORIAL 300 iL #9272952 for sale

CORIAL 300 iL is an etcher/asher designed for etching and ashing a variety of substrates. It boasts a compact, space-saving design, while its powerful locking mechanisms ensure efficient and safe operation. 300 iL is ideal for medium to large scale laboratories, offering high precision work and robust safety features. CORIAL 300 iL is equipped with a high-power, hot filament etching equipment, the spectral cathode source delivering controllable beam currents of up to 10 A, offering a wide range of beam energy levels. Precision and speed can be adjusted on the fly with CORIAL independent mechanical and optical focusing system. The highest level of accuracy can be achieved with the two-fold protection technology, providing high etching precision and a uniform layer with edge definition up to ±2 ㎛. This unit also features in-situ gas flow monitoring and control, providing etching temperatures up to 2000°C. The optional and integrated turbomolecular pump allows for gas changes of up to 5 sccm at a pressure of 7.5μm, providing an etch gain of up to 250. This integrated turbomolecular pump also allows for usage in high throughput production solutions. 300 iL incorporates advanced safety systems, such as individual area shutters, gas inerting machine, evacuation legs, and pressure controls. This allows for the safe operation of the tool, eliminating potential hazards and ensuring the highest level of safety. Further, the advanced control asset provides an intuitive user interface, as well as self-diagnostics and software updates. CORIAL 300 iL offers the highest level of etching and processing quality, and is the ideal tool for deep etch and ashing applications in the fields of semiconductors, MEMs, and nanostructure fabrication. With its compact design, combined with powerful performance and safety features, 300 iL is sure to deliver the highest quality results accurately and efficiently.