Used CORIAL 300 iL #9272962 for sale

CORIAL 300 iL is a high-power inductive-type plasma etcher and asher equipment. This system offers exceptional performance and reliability by utilizing a patented inductive-type plasma generator to provide higher plasma ionization levels than traditional capacitive coupled systems. As a result, it has proven effective for both etching and ashing of a wide range of materials. 300 iL features a compact, pulse-forming generator that allows for precise control of gas delivery, generates stable and uniform plasma density and provides an extremely smooth and reproducible plasma profile. The generator also supports multiple gas species and gases, allowing for etching and ashing with one unit. The etch chamber is equipped with a full vacuum load lock, which allows for fast and efficient sample loading and unloading. The chamber also sports a multi-stage pumping machine for fast, uniform and stable sample etching and ashing. It also has a gas mixing manifold to ensure a consistent and repeatable process. CORIAL 300 iL provides a next-generation inductive-type plasma etching and ashing experience, ideal for semiconductor processes requiring high accuracy and repeatability. With its excellent process control, high throughput and efficient 1bration of gases, the tool offers exceptional performance for all etching and ashing requirements.