Used CORIAL D500 #9386289 for sale

CORIAL D500 is an etching/ashing equipment designed with excellent precision for demanding processing of high-end components. It is a compact and robust system that provides excellent repeatability and process control and can be tailored to a wide variety of process requirements. The unit is made up of a high-precision modular single or double-level vacuum chamber with conformal coating to avoid micro-particle deposits. The machine is also equipped with precise temperature and pressure sensors for closed loop control, allowing efficient and accurate process conditions monitoring and control. D500 wafer etcher, is a multi-purpose tool capable of etching a variety of substrates including silicon wafers, silica, quartz, aluminum, semi-insulating substrates, and insulating materials. The process can also be adapted to etch multilayer structures of dielectric layers and TSV (Through Silicon Via) structures. The asset is configurable with a low pressure or high pressure etching process and also supports automated wafer handling and substrate pre-processing. The model design also allows for an interchangeable process chamber for processes with aggressive chemistries, like wet etching, deep etching with the possibility of employing chlorine gases or AJA etching. The equipment has an ultrafine motion mapping technology that provides a fast and accurate etching process, which ensures successful process matching between patterned wafers and template wafers. CORIAL D500 is equipped with advanced mask-aligning technology for precise overlay alignment of the patterned substrate materials with the etch mask. This facilitates an accurate and repeatable etching process on single or double-sided substrates. In addition, the system also has an in-process defect monitoring unit for increased etching accuracy and reproducibility. D500 is suitable for research and development cryo and dry etching applications as well as low volume and high volume production. With its unique features, the machine offers high precision and accuracy, robustness and excellent process control. CORIAL D500 is the perfect choice for the challenging process requirements of the modern semiconductor industry.