Used DENTON VACUUM DFE 3 #126422 for sale

DENTON VACUUM DFE 3 is a versatile, high-speed etcher / asher designed for a range of etching and ashing applications. It features a low costs and excellent process quality, making it an efficient choice for many production lines. DFE 3 is equipped with a 12 inch etching and ashing chamber, and is compatible with a variety of processing gases including nitrogen, oxygen, argon, and hydrogen. This makes it ideal for a wide range of etching tasks. Additionally, the equipment offers high-quality repeatability and reproducibility in both etch and ashing processes. DENTON VACUUM DFE 3 offers advanced technology for process control. This includes features such as a feedback loop system, adjustable flow valves, and full temperature control protocols. This makes it possible to refine processes to the needs of the client, providing ultimate process control. The unit is also equipped with two independent process gas valves for precise control over the etch and ashing processes. This feature is complemented by a robust vacuum chamber that is capable of reaching low pressures ranging from 1 micron of mercury up to 10 -7 microns. Finally, DFE 3 also offers a range of ancillary tools, such as load ports and sample pick-up pins, as well as a fluid-like precision motion control machine. In summary, DENTON VACUUM DFE 3 is a robust, cost-effective etcher / asher which offers high-quality results, repeatability, and reproducibility. It has been designed with a range of advanced process controls, allowing for precise etching and ashing processes. In addition, it is capable of reaching low pressures in its vacuum chamber, and is supplied with a range of accessories to provide ultimate process control.