Used DIONEX PM 11020 #9245096 for sale

DIONEX PM 11020 is an etcher/asher that is designed for use in chemical and semiconductor manufacturing processes. It is used in the process of removing unwanted exposed features on semiconductor substrates. Specifically, PM 11020 is an exact-etching tool which provides superior yield and throughput when using etching solutions and wafers such as tin, aluminum, silicon, phosphorous, and other metals. DIONEX PM 11020 is a precision-etching equipment composed of a 50 mtorr capability etching chamber, low inductance power source, standard remote chamber door locks, vacuum buss valves, and other etches. It is designed for easy installation, operation and maintenance. PM 11020 can be installed quickly and features a patented integrated safety system with safety isolation devices and automatic chamber door lock for quick and precise etching. To ensure precision, DIONEX PM 11020 utilizes an adjustable gas flow rate, high-performance lid-release valve, and quick-change gas head. This ensures that the unit has precise gas flow and the lid can be released rapidly for quick wafer changeout. Moreover, PM 11020's multi-step cooling feature ensures tight control of the etching process temperature and oxygen concentration in the etched chamber. Furthermore, DIONEX PM 11020 has a independent overpressure protection feature in which the machine is shutdown in case of any overpressure issues. This is in place to ensure that the tool does not fail once the pressure is greater than what is rated. Further safety is provided with the contamination monitor feature that prevents etches and wafers from being exposed to outside contamination and oxy-acting species in the chamber. In addition, the asset has a portable controller which makes possible to operate the model more effectively and with flexibility. This controller includes a intuitive human machine interface (HMI) that allows the user to easily monitor, control, and adjust the operating parameters. It also has fault detection and alarm diagnostics with intuitive LED lights and sound warnings that ensure that the equipment is correctly functioning and operating correctly. PM 11020 also has an integrated data acquisition system with SPC support which enables users to monitor process performance and store data for future reference. This module also allows for etch rate history to be stored and analyzed for statistical process control (SPC). All in all, DIONEX PM 11020 is a robust and reliable etcher/asher unit with many positive features. With its safety features, precise etching and wafer exchange process, and quick maintenance requirements, this machine enables customers the ability to achieve quality etch results while ensuring a safe and efficient process.