Used DNS / DAINIPPON / SCREEN SPW-813 #9402412 for sale

DNS / DAINIPPON / SCREEN SPW-813 is a high-performance etcher/asher designed and manufactured by the joint venture of DNS, SCREEN and DAINIPPON. It is a compact and reliable device powered by a PC-controlled SMIF Pod equipment. The etcher is used for processes like material removal, PECVD, and dielectric ashing. DNS SPW-813 is an 8-inch diameter 200mm Vertical etcher and asher. It features an optimal source to tool distance of 500mm, with an adjustable process time of 0-60 seconds. It is equipped with two process chambers, each with a distinct function. The first chamber is used for reactive ion etching (RIE), isotropic etching and downstream plasma processing. The other chamber is for dielectric ashing, with the capability to handle either a fully process recipe or manual control. SCREEN SPW 813 offers a wide variety of process gases and chemicals, and is capable of performing high repeatability and high yields. It is equipped with a Smart Chamber Containment System, which allows for both batch and inline processing of wafers. The combination of fully automated operation, intuitive graphical user interface, advanced process control and reliable operation makes it a great choice for production. The combination of reliability and performance makes it suitable for high-volume production of various semiconductor products. SPW-813 is easy to use and maintain. It has a friendly user interface and a built-in monitor that provides real-time feedback during etch and asher processes. The monitoring unit also provides information like process time, rate of change in temperature, and distance of the source to target. It also comes with a variety of operation diagnostics, like process alarms and warnings, to help ensure high yields and reliability. SPW 813 is an environmentally friendly device. It has an Energy Star rating, and utilizes its SMIF Pod machine to reduce overall power consumption. The device is also RoHS compliant, producing no hazardous materials to the environment. It possesses the capability to completely extract gases from the tool and keep particle generation to a minimum. DAINIPPON SPW-813 is a powerful and reliable etcher and asher manufactured to meet the high expectations of the semiconductor industry. It is capable of delivering high-performance etch and asher processes with repeatable results and high yields. Its advanced process control asset and friendly user interface allows for consistently high-quality production of various semiconductor products.