Used DNS TE-401G #293815303 for sale

Manufacturer
DNS
Model
TE-401G
ID: 293815303
Vintage: 2002
Wet etcher 2002 vintage.
DNS TE-401G is a highly advanced etcher/asher equipment used in the semiconductor industry for precise pattern transfer processes. This tool is a critical component in the fabrication of integrated circuits and other microelectronic devices. TE-401G model is manufactured by DNS, a leading provider of process equipment for semiconductor manufacturing. DNS TE-401G utilizes advanced plasma processing technology to etch or ash thin films on substrates with high precision and repeatability. It is designed to handle a wide range of substrates, including silicon wafers, glass, ceramics, and other materials commonly used in semiconductor manufacturing. The equipment is equipped with a range of features and capabilities that make it ideal for high-volume production environments. TE-401G is a dry etching system, meaning it uses plasma to remove material from the substrate rather than wet chemical processes. Dry etching offers several advantages over wet etching, including higher etching rates, better control over etch profiles, and reduced chemical waste. DNS TE-401G can perform a variety of etching processes, including isotropic and anisotropic etching, as well as plasma ashing processes for photoresist removal. TE-401G features a highly customizable process chamber that can be configured with various gas delivery systems, RF power supplies, and temperature control units to accommodate different etching processes. The unit is equipped with multiple gas inlets to introduce different process gases, such as fluorine-based chemistries for silicon etching or oxygen-based chemistries for photoresist ashing. The combination of gas flow control, RF power modulation, and temperature regulation allows for precise tuning of etch rates, selectivity, and sidewall profiles. One of the key features of DNS TE-401G is its advanced endpoint detection machine, which monitors the progress of the etching process in real-time. Endpoint detection is crucial for ensuring that the etch stops at the desired depth, preventing over-etching or under-etching of the substrate. TE-401G utilizes optical emission spectroscopy (OES) or other techniques to detect changes in the plasma emission spectrum that indicate the completion of the etch process. DNS TE-401G is also equipped with a loadlock tool that allows for automated substrate loading and unloading, minimizing downtime between etching runs. The asset is designed for high throughput and reliability, making it suitable for 24/7 production environments. Additionally, TE-401G incorporates advanced process control software that enables recipe management, data logging, and remote monitoring capabilities. In summary, DNS TE-401G is a highly advanced etcher/asher tool that offers precise and reliable processing capabilities for semiconductor manufacturing. Its combination of advanced plasma technology, customizable process chamber, endpoint detection model, and automation features make it a versatile tool for a wide range of etching applications. With its high throughput and process control capabilities, TE-401G is an essential tool for achieving high yields and quality in semiconductor device fabrication.
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