Used DRYTEK 384T #9083713 for sale

DRYTEK 384T is an etcher/asher designed for use in the most demanding microelectronics and thin-film material processing applications. It is designed for reactive ion etching and plasma assisted etching and ashing procedures, and is used across a wide range of industries including semiconductor, biomedical, pharmaceuticals and communications. 384T has a 24 x 24 inches (610 x 610 mm) chamber with a maximum wafer size of 4 inch (100 mm) diameter. The vacuum chamber is made of high quality stainless steel and equipped with an ultra-low O2/N2 gas control system. This system allows for precise control of process recipes through a touch screen panel. DRYTEK 384T can achieve process temperatures ranging from room temperature to 1000°C, with base pressures of 0.5 mtorr. It also has an adjustable high frequency radio frequency power source for plasma etching and ashing. 384T has a wide variety of accessories available for custom application setup. These include shutter systems, transport systems and reaction stage carts. The transport systems provide a complete wafer transport solution, including sample preparation and operation with interchangeable robotic arms. The reaction stage carts allow for customizing the system with thermocouples, temperature controllers and a variety of other heating elements. DRYTEK 384T etcher/asher is designed for reliability and ease of use, featuring built in safety and diagnostic systems. These systems provide real time process monitoring and feedback to optimize process yield. The integrated ion beam source allows for UV-enhanced etch and ashing to achieve high selectivity and low residual damage. In addition, the wafer spinner is capable of speeds of up to 50,000 rpm, allowing for accurate uniformity and uniformity control. 384T is suitable for a wide range of etch and ashing applications, including high-density plasma etches, high-rate ashing, selectivity etches, reactive ion etch (RIE), and wafer resist process. Its robust design, along with its reliable controls and cleanliness features, offer excellent process stability and repeatability. In addition, it offers long term cost effectiveness and maintenance advantages. DRYTEK 384T is designed for the most complex materials processing requirements, making it the ideal solution for any etching or ashing application.