Used E&R Plasmax 600A #9217455 for sale

E&R Plasmax 600A
Manufacturer
E&R
Model
Plasmax 600A
ID: 9217455
Vintage: 2006
Plasma cleaning system 2006 vintage.
E&R Plasmax 600A Etcher/Asher is a fully automated etching and ashing equipment used for a variety of challenging applications. It is capable of plasma etching, wet etching, and dry ashing/stripping, allowing it to be used for a wide range of etching and ashing operations. This etch/ash system allows the user to easily program and adjust etching and ashing parameters for efficient and repeatable process control. Plasmax 600A features a modular design with a built-in RF generator and a compact matching network that meets requirements for a wide range of frequencies (up to 950 MHz). This unit is equipped with a built-in high voltage generator for the plasma generation and an emission meter to measure the plasma emission levels during etching/ashing operations. E&R Plasmax 600A also features an integrated safety machine with interlock and alarm functions to prevent accidents during operation. This etcher/asher offers an optimized process chamber that has been designed for improved etching, ashing, and dry stripping performance. It features a quartz window and shutter, vacuum pump, digital process pressure control tool, and vacuum gauge for monitoring etching/ashing performance. Plasmax 600A also features nitrogen and oxygen input ports with integrated mass flow controllers to ensure precise and stable etching and micromachining processes. The etcher/asher also boasts a wide variety of accessories to customize its operation and meet various requirements. This includes electrostatic chucks, special stages and plates for machining delicate materials, optical masks for controlling process areas, and an anti-contamination (APC) asset for protecting expensive components and substrates. Additionally, E&R Plasmax 600A can be upgraded to add extra features for more specialized applications. For example, the model can be fitted with a capacitance-coupled plasma (CCP) display, a multi-level stainless-steel platform for efficient heat dissipation, or an inert gas generator for improved plasma uniformity. Overall, Plasmax 600A is a highly reliable and precise etching and ashing equipment that can be used for a wide range of challenging applications. It is designed to provide maximum process flexibility and repeatability, resulting in superior process control and improved performance.
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