Used E&R Plasmax-602A #9157568 for sale

E&R Plasmax-602A is a highly reliable and precise etcher/asher that is designed to meet the needs of modern production line manufacture. It features an innovative "open-architecture" with a 16-position carousel for accommodating up to 16 wafers-all of which can be aligned with up to 8 wafer layers. This ensures that even as many as 16 wafers can be etched or ashed at once with high precision. Plasmax-602A has a rigid, yet flexible design that ensures high levels of precision. Its integrated power equipment features a loadline-compensated, fast-response HF power supply, as well as a DC power supply with up to 600 V output. This enables precise etching or ashing of wafers while maintaining a high degree of uniformity and repeatability. E&R Plasmax-602A also features excellent safety features. Its Vacuum Class II Safety Level ensures that the system is protected from external contamination. In addition, it also includes an optional safety microswitch, as well as a dielectric film installation option to further improve safety and reduce risk. Plasmax-602A is also capable of working with a wide range of etching and ashing materials, and offers easy-access side ports for media loading and unloading. Its process control is highly efficient, with support for both PC and PLC control systems, as well as full-scale data acquisition. Its intuitive user interface enables straightforward process development, as well as critical process monitoring functions, to ensure optimal unit performance. Finally, E&R Plasmax-602A is equipped with features such as an advanced sensor array, a modular process suite, and quick-release parts cartridges. This ensures that the machine is highly adaptable and able to meet the unique etching and ashing needs of a wide range of applications. In addition, its comprehensive service package ensures that it remains operating at peak performance for years to come.