Used E&R Plasmax 800C #293748025 for sale
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E&R Plasmax 800C is an etcher/asher designed by E&R for plasma-enhanced dry etching of many materials. Designed to give users maximum precision and repeatability to ensure consistent part quality, Plasmax 800C is a powerful tool used in thin-film deposition and compound semiconductor device manufacturing. The equipment features a robust base design to enable reliable long-term operation, including vibration dampening, balanced control, and easy access for maintenance and servicing. The user interface is comprehensive and easy to use, allowing users to quickly get up and running and create complex etching patterns quickly and easily. At the heart of E&R Plasmax 800C is the integrated high-pressure plasma source, designed to provide superior etching performance. The plasma source operates over a wide range of pressures, with adjustable parameters allowing precise control of process gas chemistry, temperature, and species distribution. When operated at higher pressures, the system maximizes etch selectivity and selectivity control, while at lower pressures it can be used for batch processing of many materials. Plasmax 800C is fully automated, providing users with the ability to program and save recipes for specific etching patterns and processes. The fully automatic source and process control capabilities allow greater process consistency and accuracy, and permit customers to create unique custom processes. The unit is further enhanced by a variety of optional features, such as laser height metrology and protective hardened coatings, that allow users to achieve a wide range of process technologies in a wide variety of materials. In addition, E&R Plasmax 800C comes with an array of intuitive software tools designed to simplify machine operation, including profile-based recipes, single-step wafer-pattern recognition, and the ability to program and store recipes. Plasmax 800C is a powerful yet easy-to-use etcher/asher that offers industry-leading performance and flexibility. It delivers superior etch rates, superior selectivity control, and reliable, repeatable results, and can help customers quickly and easily transition from a manual process to a highly efficient, automated one.
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