Used GASONICS 9102 #9231046 for sale

Manufacturer
GASONICS
Model
9102
ID: 9231046
Plasma asher.
GASONICS 9102 is a robust, cost-effective, and user-friendly etcher/asher equipment. This system was designed with a focus on providing users with an efficient and reliable etching and ashing solution that with provide the highest levels of performance. 9102 features an advanced, easy-to-use control unit with a color graphical user interface, as well as multiple program memories. The machine offers precise control of all of the major etching and ashing parameters, including etching temperature, pressure, and duration. It is also able to store user-defined recipes which allow for simple, one-touch operation and reduced downtime. The tool has a variety of safety features, such as automated preventive maintenance as well as over-temperature protection. The plasma asher chamber is constructed with stainless steel and Silicon Carbide for superior etching capability and uniformity. GASONICS 9102 has a small footprint, allowing it to fit easily on a lab bench. 9102 has a variety of optional features that allow it to be tailored to the user's needs. These include advanced diagnostics such as residue analysis and production tracking, as well as multiple ablative sources which can be mounted on the asset. In addition to its ashing and etching capabilities, GASONICS 9102 can perform ozone-based surface cleaning operations. This is achieved through an integrated Ozonator module, which can generate a controlled concentration of ozone gas within the etching chamber. 9102 is a reliable and efficient asher/etcher model that is designed to meet the most demanding applications. Its advanced features, ease-of-use, and wide range of options make it the perfect choice for users looking to achieve high-quality results with minimal maintenance.
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