Used GASONICS Aura 1000 #293690392 for sale

GASONICS / NOVELLUS A 1000 is an etcher/asher tool engineered to provide advanced etching solutions for use in the semiconductor wafer fabrication process. Despite its low footprint and attractive price, the tool boasts a wide range of features and benefits. GASONICS A 1000 Model is designed to provide full-range etching control with maximum semiconductor wafer throughput. The process chamber is constructed with premium-grade stainless steel and features an integrated, low-temperature-resistant polymer coating that enhances corrosion protection and helps maintain chamber cleanliness. The system was designed to accommodate a wide range of wiring and metrology technologies, allowing for the deepest and most precise etch processes available. NOVELLUS A1000 Model includes advanced PRISM (Programmable and Remotely Interface-able Smart Modules) controllers to improve both etch process automation and operator safety. The PRISM modules allow operators to easily configure and control etch processes from remote locations. GASONICS A1000 Model also features machine vision systems to allow for accurate detection of critical feature sizes and locations on the wafer during the etch process. A1000 Model can handle up to 40 wafers per hour and is capable of etching different sizes from as small as 50 microns. The tool also offers superior uniformity and repeatability with minimum chamber-to-chamber variations. To improve process optimization and further reduce chamber-to-chamber variations, A 1000 Model can be equipped with multiple process gases such as Fluorine, Argon, and Oxygen. Its chemical handling system is designed to transfer reactive chemicals safely and is equipped with a resilient stainless steel evaporative condenser to maintain process gas chemistry. GASONICS / NOVELLUS A1000 Model ensures that fabrication processes run faster and more efficiently with reduced cost while providing superior results. With its superior etch process solution, reduced part costs, and optimized workflow capabilities, NOVELLUS A 1000 is an essential etcher/asher tool for any advanced semiconductor wafer fabrication process.