Used GASONICS Aura 1000 #293746361 for sale

GASONICS Aura 1000 is a sophisticated etcher and asher designed for the most demanding of processes, with features ranging from 100mm wafer processing through to 400mm wafer processing. This sophisticated etcher and asher allows for high performance plasma etching and ashing process results with minimal sample damage. This system features two source chambers, allowing users to configure the tool with up to three chambers and an optional ashing chamber. Each source chamber houses two separate and independent gas sources, with a wide range of options available to achieve the exact process requirement. The system is controlled through the intuitive WIN TESS software dedicated controller to ensure precise process control. The reliable and precise temperature control for substrate bias and stage temperature is maintained at all times, delivering consistent and repeatable results. The system offers advanced process control capability with the etch bias, vacuum level, flow rate, sheath flow, and pressure being controllable through the precise calibration of the onboard gas sources. Aura 1000 also includes an Optional Chamber Incorporating a Retainable Membrane Unit (RMA) which improves wafer uniformity in the etch and ashing processes. The patented RMA technology delivers much higher yields in certain applications. GASONICS Aura 1000 is designed to provide fault tolerance by monitoring and displaying useful process parameters in real-time, such as gas pressure, flow, temperature and vacuum levels. This allows users to increase the yield and achieve consistent performance with minimal risk of damage. The machine's intuitive operator display panel provides at-a-glance information needed to identify, understand, and resolve any issues. Aura 1000 is designed to reduce cycle times while delivering superior uniformity and etching performance. With GASONICS unrivalled support and world-leading plasma etching and ashing processes, users are always assured of fast turnaround.