Used GASONICS Aura 1000 #293764333 for sale

GASONICS / NOVELLUS A 1000 is an advanced etcher/asher primarily used in semiconductor production. It is a fully-featured etcher/asher which includes both front-end process capabilities and post processing reverse angle cleaning technologies. GASONICS A 1000 features a 10-zone advanced plasma source, providing uniform overspray removal, minimizing particle contamination and improving process reproducibility. The machine's advanced photomask operations enable defect-free processing of a variety of photomasks, including BEOL and BEOL/back-end (ULE and BAL) photomasks. The etcher can process wafers with a diameter of up to 200mm, and wafer sizes ranging from 200mm to 6 inches. Its unique etching window can be programmed and optimized according to individual parameters, without compromising the performance of the machine. NOVELLUS A1000 can process various dielectrics and semiconductor materials, and its internal gate-level clean technology ensures low-contamination process results. The advanced exhaust equipment also ensures effective & long-term air filtration, whilst also precluding scratches. To manage etch profile, the machine comes with a scan select technology that allows for profiling of different wafers and substrates for testing. It also offers 3D surface patterning for more precise control over the profile of the etched features. In addition, it features a temperature control system which allows for the temperature-controlled etching of the substrate material, as well as a clean diagnostics unit for monitoring the wafer shape and profile, enabling real-time process control. Overall, A 1000 is an advanced etcher/asher designed to meet the highest levels of industrial requirements. Its many features, from its advanced process capabilities to its high-level clean diagnostics machine, make it an excellent choice for any etching or ashing application.