Used GASONICS Aura 1000 #293810521 for sale

GASONICS / NOVELLUS Aura 1000 is a durable and advanced etcher or asher. This equipment is designed to enable multi-layered topographical patterning on a variety of substrates. The surface being etched can range from flat substrates like glass and quartz to curved surfaces like silicon. GASONICS Aura 1000 boasts a process- broaden runtime range of up to 75 minutes, depending on settings, that allows for a precise start-to-finish etching schedule. Its all-inclusive system has a reliable ceramic, cooled-down sub-chamber, which helps increase productivity and reduce particle fallout. NOVELLUS Aura 1000 is outfitted with a state-of-the-art Atlas software suite that provides users with more precise control and feedback on their processes. An integrated in-situ End Point Detection (EP) feature allows for accurate control of the endpoint, greatly enhancing the overall patterning performance. The software utilizes fine grain process control and automation that can minimize EMF fluctuations and provide exceptional repeatability and traceability. This allows users to engineer intricate structures with precision and unparalleled accuracy. Built with a modular design that helps streamline maintenance processes, Aura 1000 also consists of a dual-end electrostatic drive that allows powerful DC bias to be applied in both directions, resulting in a wider range of improved etching results. Achieved through a unit of thick-film 11 jumper matrix, this unique feature allows users to modify the pattern in real-time through preprogrammed logic steps. All of these features provide an important benefit to its users: maximum process flexibility. GASONICS / NOVELLUS Aura 1000 works comfortably with a range of gasses and plasma chemistries, allowing users to tailor their process to the task at hand. Equipped with a tight-sealing nozzle that ensures superior process quality, this machine can accommodate a wide variety of user needs, making GASONICS Aura 1000 an essential tool for those looking to maximize their process flexibility.